X-ray Photoelectron Spectroscopy (XPS)
PHI 5000 VersaProbe II
The instrument is equipped with a monochromatic, micro-focused, scanning X-ray source which provides excellent large area and superior micro-area spectroscopy performance. Spectroscopy, depth profiling and imaging can all be performed over the full range of X-ray beam sizes including the minimum X-ray beam size of less than 10 µm. The multi-technique includes a UV lamp for Ultraviolet Photoelectron Spectroscopy (UPS) measurements and a hot/cold sample stage.
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Example of XPS multi-point analysis |
Main instrumental features:
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| Survey spectra | O1s narrow spectrum | |
