X-ray Photoelectron Spectroscopy (XPS)
PHI 5000 VersaProbe II
The instrument is equipped with a monochromatic, micro-focused, scanning X-ray source which provides excellent large area and superior micro-area spectroscopy performance.
Spectroscopy, depth profiling and imaging can all be performed over the full range of X-ray beam sizes including the minimum X-ray beam size of less than 10 µm. The multi-technique includes a UV lamp for Ultraviolet Photoelectron Spectroscopy (UPS) measurements.
Main instrumental features:
- Monochromatic X-ray source
- UV He-I and He-II lamp
- C60 gun, Ar ion gun, electron gun
- Spatial resolution better than 10 μm
- Cold - Hot sample stage
